US 12,188,818 B2
Spectrometer, metrology system, and semiconductor inspection method
Hidaka Yasuhiro, Yokohama (JP); and Jinyong Kim, Yokohama (JP)
Assigned to Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on May 27, 2022, as Appl. No. 17/827,051.
Claims priority of application No. 2021-101823 (JP), filed on Jun. 18, 2021; and application No. 10-2022-0013618 (KR), filed on Jan. 28, 2022.
Prior Publication US 2022/0404197 A1, Dec. 22, 2022
Int. Cl. G01J 3/02 (2006.01); G01J 3/28 (2006.01); H01L 21/66 (2006.01)
CPC G01J 3/0208 (2013.01) [G01J 3/2823 (2013.01); H01L 22/12 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A spectrometer comprising:
a first collimator lens configured to generate parallel pieces of light by collimating light that has passed through an incident slit, the first collimator lens having a first optical axis;
a dispersive optical element configured to generate dispersed pieces of light by dispersing the parallel pieces of light at different angles according to wavelengths;
a focusing lens configured to generate focused light by focusing the dispersed pieces of light, the focusing lens having a second optical axis that is spaced from and parallel to the first optical axis; and
a spatial light modulator on the second optical axis and having a reflective plane configured to generate reflective light by reflecting the focused light focused by the focusing lens,
wherein the reflective light is output through an output slit by passing through the focusing lens, the dispersive optical element and a second collimator lens,
the incident slit, the output slit, and the reflective plane have a conjugate relationship on a second plane perpendicular to a first plane,
the first plane includes optical paths of the dispersed pieces of light,
the second plane includes an optical axis of the first collimator lens and an optical axis of the focusing lens.