| CPC G01F 1/86 (2013.01) [G01N 11/04 (2013.01)] | 11 Claims |
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1. A flow measurement system, comprising:
a flow splitter provided with a plurality of channels configured to flow a gas mixture of a plurality of pure gases, each of the plurality of channels provided with a pressure sensor;
a processor; and
a non-volatile memory storing:
a mathematical model representing a flow of gas through the plurality of channels;
a plurality of physical properties for the plurality of pure gases; and
executable instructions that, in response to execution by the processor, cause the processor to:
retrieve the plurality of physical properties for the plurality of pure gases;
estimate a plurality of physical properties for the gas mixture;
receive a plurality of pressure values from the pressure sensors of the plurality of channels;
estimate a plurality of flow parameters for the plurality of channels of the flow splitter using the mathematical model, the plurality of physical properties for the gas mixture, and the plurality of pressure values from the pressure sensors of the plurality of channels; and
estimate a plurality of flow splits using the plurality of flow parameters for the plurality of channels of the flow splitter.
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