US 12,188,769 B2
Defect inspection device and defect inspection method
Koki Yoshida, Kyoto (JP); Kenji Takubo, Kyoto (JP); and Takahide Hatahori, Kyoto (JP)
Assigned to SHIMADZU CORPORATION, Kyoto (JP)
Appl. No. 17/792,405
Filed by SHIMADZU CORPORATION, Kyoto (JP)
PCT Filed Oct. 12, 2020, PCT No. PCT/JP2020/038469
§ 371(c)(1), (2) Date Jul. 13, 2022,
PCT Pub. No. WO2021/145034, PCT Pub. Date Jul. 22, 2021.
Claims priority of application No. 2020-005696 (JP), filed on Jan. 17, 2020.
Prior Publication US 2023/0062821 A1, Mar. 2, 2023
Int. Cl. G01B 9/02 (2022.01); G01B 9/02098 (2022.01); G01N 29/04 (2006.01); G01N 29/12 (2006.01); G01N 29/44 (2006.01)
CPC G01B 9/02095 (2013.01) [G01B 9/02098 (2013.01); G01N 29/041 (2013.01); G01N 29/043 (2013.01); G01N 29/12 (2013.01); G01N 29/4454 (2013.01); G01N 2291/014 (2013.01); G01N 2291/0234 (2013.01); G01N 2291/0289 (2013.01); G01N 2291/262 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A defect inspection device comprising:
an excitation unit that excites an elastic wave in an inspection target;
a control unit that acquires vibration state information which is information about a state of the elastic wave excited in the inspection target for a plurality of frequencies by changing a frequency of excitation vibration caused by the excitation unit in order to excite the elastic wave in the inspection target, and extracts recommended frequencies recommended for inspecting a defect of the inspection target from among the plurality of frequencies based on the acquired vibration state information for the plurality of frequencies;
an irradiation unit that irradiates a measurement region of the inspection target with laser lights in a state of exciting the elastic wave in the inspection target by the excitation unit; and
a measurement unit that causes the laser lights reflected in the measurement region to interfere with each other by a laser interference method, and measures the interfered laser lights.