| CPC F28D 7/0016 (2013.01) [F28F 27/02 (2013.01); F28F 2250/00 (2013.01)] | 10 Claims |
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1. A system comprising:
a conduit;
a heat exchanger including:
a first inlet in fluid communication with a tank that contains a first chemical solution of a known concentration at an ambient storage temperature,
a second inlet in fluid communication with the conduit, wherein the conduit is in fluid communication with a semiconductor manufacturing process tool that manufactures semiconductors and that is configured to heat a second chemical solution to a working temperature that is greater than the ambient storage temperature,
a first outlet in fluid communication with the first inlet, and
a second outlet in fluid communication with the second inlet,
wherein the conduit conveys the second chemical solution from the semiconductor manufacturing process tool to the second inlet, wherein the heat exchanger is configured to receive a quantity of the first chemical solution via the first inlet and a quantity of the second chemical solution via the second inlet to activate heat transfer between the quantity of the first chemical solution and the quantity of the second chemical solution so that the temperature of the received quantity of the first chemical solution is raised toward the working temperature;
a first valve including:
a first valve inlet in fluid communication with the first outlet,
a second valve inlet in fluid communication with the second outlet, and
a valve outlet in fluid communication with the first valve inlet and the second valve inlet, wherein the first valve is configured to selectively provide the first chemical solution or the second chemical solution as an output solution from the valve outlet; and
a flow cell having a flow cell inlet and a flow cell outlet, the flow cell inlet in fluid communication with the valve outlet for receiving as an input solution the output solution from the valve outlet, the flow cell configured to analyze the input solution to determine one or more value of at least one parameter of the input solution, the flow cell outlet in fluid communication with the semiconductor manufacturing process tool via a second valve to selectively provide the input solution to the semiconductor manufacturing process tool.
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