CPC F25B 21/02 (2013.01) [A61B 18/203 (2013.01); A61F 7/007 (2013.01); F28D 15/0233 (2013.01); F28D 15/0275 (2013.01); F28D 15/046 (2013.01); H01L 23/38 (2013.01); H10N 10/00 (2023.02); H10N 10/13 (2023.02); H10N 10/17 (2023.02); A61B 2018/00452 (2013.01); A61F 2007/0075 (2013.01)] | 19 Claims |
1. A thermal management system, comprising:
a thermoelectric component having a first side configured to be thermally coupled to a target material and a second side opposite the first side;
a heat transfer unit thermally coupled to the second side of the thermoelectric component, the heat transfer unit comprising (i) a chamber including an inlet region and an outlet region, and (ii) microfeatures in the chamber spaced apart from each other such that, in operation, a working fluid is directed between the microfeatures from the inlet region toward the outlet region; and
a controller configured to operate the thermoelectric component and the heat transfer unit such that the heat transfer unit cools the second side of the thermoelectric component to a first temperature, wherein the thermoelectric component is configured to change the temperature of the target material to a second temperature within a range of 0.5 to 20 seconds, and wherein the second temperature is within a range of +/−60° C. of the first temperature.
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13. A semiconductor device, comprising:
a semiconductor component; and
a thermal management system comprising:
a thermoelectric component including a first side configured to be thermally coupled to the semiconductor component and a second side opposite the first side;
a heat transfer unit thermally coupled to the second side of the thermoelectric component, the heat transfer unit comprising (i) a chamber including an inlet region and an outlet region, and (ii) microfeatures in the chamber that are spaced apart from each other such that, in operation, a working fluid is directed between the microfeatures from the inlet region of the chamber to the outlet of the chamber; and
a controller configured to operate the thermoelectric component and the heat transfer unit such that the heat transfer unit cools the second side of the thermoelectric component to a first temperature and the thermoelectric component changes the temperature of the semiconductor component to a second temperature.
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19. A thermal management system, comprising:
a thermoelectric component having a first side configured to be thermally coupled to a target material and a second side opposite the first side;
a heat transfer unit in contact with and thermally coupled to the second side of the thermoelectric component, the heat transfer unit comprising a chamber including microfeatures, an inlet region, and an outlet region, wherein the chamber is configured to receive a working fluid that flows from the inlet region toward the outlet region, such that the working fluid absorbs heat from the thermoelectric component and transfers heat to the chamber; and
a controller configured to operate the thermoelectric component and the heat transfer unit such that the heat transfer unit cools the second side of the thermoelectric component to a first temperature and the thermoelectric component changes the temperature of the target material to a second temperature within a range of 0.5 to 20 seconds, and wherein the second temperature is within a range of +/−60° C. of the first temperature.
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