US 12,188,145 B2
Device and method for continuous VGF crystal growth through reverse injection synthesis
Shujie Wang, Hebei (CN); Niefeng Sun, Hebei (CN); Tongnian Sun, Hebei (CN); Huisheng Liu, Hebei (CN); Yanlei Shi, Hebei (CN); Huimin Shao, Hebei (CN); Lijie Fu, Hebei (CN); Jian Jiang, Hebei (CN); Xiaodan Zhang, Hebei (CN); Xiaolan Li, Hebei (CN); and Yang Wang, Hebei (CN)
Assigned to THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION, Hebei (CN)
Appl. No. 16/627,919
Filed by THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION, Hebei (CN)
PCT Filed Dec. 21, 2018, PCT No. PCT/CN2018/122627
§ 371(c)(1), (2) Date Dec. 31, 2019,
PCT Pub. No. WO2020/118755, PCT Pub. Date Jun. 18, 2020.
Claims priority of application No. 201811532441.0 (CN), filed on Dec. 14, 2018.
Prior Publication US 2021/0285123 A1, Sep. 16, 2021
Int. Cl. C30B 11/00 (2006.01); C30B 27/00 (2006.01); C30B 29/40 (2006.01)
CPC C30B 11/001 (2013.01) [C30B 11/006 (2013.01); C30B 11/007 (2013.01); C30B 27/00 (2013.01); C30B 29/40 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A device for continuous VGF crystal growth, comprising a furnace body, a crucible, a heat preservation system, a heating system, a temperature control system and a gas pressure regulation system,
characterized in that:
the crucible, disposed in the furnace body, has a synthesis unit at its upper part, and has a crystal growth unit and a seed crystal unit at its lower part, and the synthesis unit is communicated with the crystal growth unit through one or more capillary pores;
a relationship between a radius r of the one or more capillary pores and h is as follows:

OG Complex Work Unit Math
where ρ is a density of a melt, g is the acceleration of gravity, σ is an interfacial tension of the melt, and h is a height of the melt in the synthesis unit in the crucible; and
each of the one or more capillary pores has the radius r of 0.1 mm to 0.15 mm;
wherein the one or more capillary pores enable gasified volatile element to enter the synthesis unit from the crystal growth unit and the melt to enter the crystal growth unit from the growth unit; and
wherein the heating system is configured to control temperatures of each of a first plurality of heating zones of the crystal growth unit and temperatures of each of a second plurality of heating zones of the synthesis unit to first cause the gasified volatile element to be injected from the crystal growth unit into the synthesis unit through the one or more capillary pores and then the melt to be dropped from the synthesis unit into the crystal growth unit through the one or more capillary pores.