US 12,188,143 B2
Electroplating device and electroplating system
Daiqiong (Diana) Zhang, Shanghai (CN); Yuelin (Kevin) Liang, Shanghai (CN); Dongqing (Gates) Peng, Suzhou (CN); Chunyan (Cherie) Zhou, Shanghai (CN); and Zhongxi Huang, Shanghai (CN)
Assigned to Tyco Electronics (Suzhou) Ltd., Suzhou (CN); and Tyco Electronics (Shanghai) Co., Shanghai (CN)
Filed by Tyco Electronics (Shanghai) Co., Ltd., Shanghai (CN); and Tyco Electronics (Suzhou) Ltd., Suzhou (CN)
Filed on Jan. 29, 2022, as Appl. No. 17/588,242.
Claims priority of application No. 202110133322.3 (CN), filed on Jan. 29, 2021.
Prior Publication US 2022/0243355 A1, Aug. 4, 2022
Int. Cl. C25D 17/02 (2006.01); C25D 21/14 (2006.01)
CPC C25D 21/14 (2013.01) [C25D 17/02 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An electroplating device, comprising:
an electroplating bath adapted to contain an electroplating solution into which a workpiece defining a cathode to be electroplated is at least partially immersed;
a pair of first anodes arranged in the electroplating bath each first anode defining a plurality of through holes, one first anode of the pair of first anodes arranged on a side of the workpiece and the other of the first anode of the pair of first anodes arranged on the other side of the workpiece;
a second anode having an electrolytic potential that is lower than that of the pair of first anodes;
and
a liquid spraying device, comprising:
a main body part having at least one inlet for conveying the electroplating solution into the main body part; and
a plurality of nozzles installed on the main body party,
wherein one first anode of the pair of first anodes is arranged between the liquid spraying device and the workpiece, at least part of the plurality of nozzles are positioned such that a flow direction of the electroplating solution ejected from the nozzle is substantially parallel to a direction of a power line formed by one first anode of the pair of first anodes and the cathode, a portion of the electroplating solution ejected from the plurality of nozzles in the flow direction flows through the plurality of through holes of one first anode of the pair of first anodes in the flow direction, one first anode of the pair of first anodes arranged between the workpiece and the second anode in the flow direction of the electroplating solution.