	US 12,188,122 B2
	Process and device for providing vapor
Oliver Hohn, Gründau (DE); Michael Reising, Mömbris (DE); Johannes Grübler, Käbschütztal (DE); Kurt Pietsch, Dresden (DE); and Jörg Koch, Dautphetal (DE)
Assigned to SINGULUS TECHNOLOGIES AG, Kahl am Main (DE)
Appl. No. 17/252,456
Filed by SINGULUS TECHNOLOGIES AG, Kahl am Main (DE)
PCT Filed Mar. 20, 2019, PCT No. PCT/EP2019/056998 § 371(c)(1), (2) Date Dec. 15, 2020, PCT Pub. No. WO2019/242899, PCT Pub. Date Dec. 26, 2019.
Claims priority of application No. 10 2018 004 987.7 (DE), filed on Jun. 20, 2018.
Prior Publication US 2021/0189559 A1, Jun. 24, 2021
Int. Cl. C23C 16/448 (2006.01); B01B 1/00 (2006.01); C23C 16/52 (2006.01); G05D 23/19 (2006.01)

CPC C23C 16/4481 (2013.01) [B01B 1/005 (2013.01); C23C 16/52 (2013.01); G05D 23/19 (2013.01)]

23 Claims

1. A method for providing vapor for a discontinuous process, the method comprising:

flowing a liquid into a direct evaporator using a liquid metering device;

evaporating the flowing liquid in the direct evaporator to generate a vapor;

transporting the vapor from the direct evaporator to a process region via a storage volume, wherein a temperature of the storage volume is closed loop controllable;

wherein a fluid connection between the storage volume and the process region is interrupted when no vapor is required in the process region, and wherein vapor continues to be generated and transported into the storage volume at least temporarily during the interruption so that a pressure within the storage volume increases during the interruption, wherein V_storage>(Q×dt)/(p_vap(T)−p₀), wherein Q is a mass flow at the direct evaporator, dt is a maximum duration of the interruption, p_vap(T) is a temperature-dependent vapor pressure of the flowing liquid, and p₀is an initial pressure in the direct evaporator prior to the interruption.