US 12,188,116 B2
Free-standing lithium phosphorus oxynitride think films and methods of their manufacture
Ying Shirley Meng, San Diego, CA (US); Diyi Cheng, La Jolla, CA (US); and Thomas A. Wynn, Oceanside, CA (US)
Assigned to The Regents of the University of California, Oakland, CA (US)
Appl. No. 18/041,793
Filed by The Regents of the University of California, Oakland, CA (US)
PCT Filed Aug. 17, 2021, PCT No. PCT/US2021/046378
§ 371(c)(1), (2) Date Feb. 15, 2023,
PCT Pub. No. WO2022/040236, PCT Pub. Date Feb. 24, 2022.
Claims priority of provisional application 63/067,801, filed on Aug. 19, 2020.
Prior Publication US 2023/0313362 A1, Oct. 5, 2023
Int. Cl. C23C 14/06 (2006.01); C23C 14/00 (2006.01); C23C 14/02 (2006.01); C23C 14/34 (2006.01)
CPC C23C 14/0676 (2013.01) [C23C 14/0005 (2013.01); C23C 14/024 (2013.01); C23C 14/3407 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
modifying a surface of a substrate;
forming a layer of lithium phosphorus oxynitride (LiPON) on the modified surface of the substrate; and
separating the layer of LiPON from the substrate.