US 12,187,984 B2
Treatment liquid and method for treating object to be treated
Yasuo Sugishima, Shizuoka (JP)
Assigned to FUJIFILM Corporation, Tokyo (JP)
Filed by FUJIFILM Corporation, Tokyo (JP)
Filed on Feb. 28, 2022, as Appl. No. 17/683,241.
Application 17/683,241 is a continuation of application No. PCT/JP2020/029401, filed on Jul. 31, 2020.
Claims priority of application No. 2019-159225 (JP), filed on Sep. 2, 2019; and application No. 2020-021201 (JP), filed on Feb. 12, 2020.
Prior Publication US 2022/0282182 A1, Sep. 8, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. C11D 3/28 (2006.01); B08B 3/10 (2006.01); C11D 3/00 (2006.01); C11D 3/04 (2006.01); C11D 3/20 (2006.01); C11D 3/30 (2006.01); C11D 3/33 (2006.01); C11D 3/43 (2006.01); C11D 7/08 (2006.01); C11D 7/26 (2006.01); C11D 7/32 (2006.01); H01L 21/302 (2006.01); C23C 16/06 (2006.01)
CPC C11D 3/0073 (2013.01) [B08B 3/10 (2013.01); C11D 3/042 (2013.01); C11D 3/2075 (2013.01); C11D 3/2082 (2013.01); C11D 3/30 (2013.01); C11D 3/33 (2013.01); C11D 7/08 (2013.01); C11D 7/265 (2013.01); C11D 7/3245 (2013.01); C11D 7/3281 (2013.01); H01L 21/302 (2013.01); C23C 16/06 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A treatment liquid comprising:
water;
hydroxylamine; and
three kinds of first anions consisting of Cl−, NO2−, and NO3−,
wherein a total content of the first anions is 0.0001 to 30 parts by mass with respect to 100 parts by mass of the hydroxylamine.