US 12,187,528 B2
Substrate storage container
Osamu Ogawa, Saitama (JP)
Assigned to Shin-Etsu Polymer Co., Ltd., Tokyo (JP)
Appl. No. 17/640,334
Filed by Shin-Etsu Polymer Co., Ltd., Tokyo (JP)
PCT Filed Aug. 7, 2020, PCT No. PCT/JP2020/030392
§ 371(c)(1), (2) Date Mar. 4, 2022,
PCT Pub. No. WO2021/044804, PCT Pub. Date Mar. 11, 2021.
Claims priority of application No. 2019-161871 (JP), filed on Sep. 5, 2019.
Prior Publication US 2022/0324634 A1, Oct. 13, 2022
Int. Cl. H01L 21/673 (2006.01); B08B 9/093 (2006.01); B65D 85/30 (2006.01)
CPC B65D 85/30 (2013.01) [B08B 9/093 (2013.01); H01L 21/67386 (2013.01); B08B 2209/08 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A substrate storage container, comprising:
an opening on a front surface side; and
a gas supply mechanism on a bottom surface, wherein
the gas supply mechanism comprises:
an introduction path configured to receive a gas from a bottom surface side;
a check valve disposed at a position that does not overlap with the introduction path in a direction perpendicular to the bottom surface; and
a flow path extending between the introduction path and the check valve and configured to supply the gas from the introduction path to the check valve.