| CPC B41J 29/393 (2013.01) [B05B 15/522 (2018.02); G02F 1/1303 (2013.01); G06K 15/027 (2013.01); H10K 71/135 (2023.02)] | 19 Claims |
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1. A substrate treating apparatus comprising:
a maintenance stage;
a transfer rail extending lengthwise in a first direction and disposed at the maintenance stage;
a process stage spaced apart from the maintenance stage in a second direction perpendicular to the first direction when viewed in a plan view, wherein a substrate to be processed is disposed on the process stage;
a support unit configured to move along the transfer rail in the first direction and having a plate that supports a calibration board, on which a plurality of alignment marks are displayed;
a first vision unit configured such that a relative location of the first vision unit with respect to the plate is changeable in the first direction, and configured to photograph the calibration board;
a second vision unit configured to photograph the calibration board in a line scan scheme that is different from that of the first vision unit, wherein a length of the second vision unit is the same as or greater than a width of the calibration board so that an image of the calibration board is acquired in the line scan scheme, and wherein the length of the second vision unit and the width of the calibration board is measured in the second direction;
a gantry disposed above the maintenance stage and the process stage, wherein the gantry extends lengthwise in the second direction, and wherein the second vision unit is fixedly attached to a bottom surface of the gantry; and
an inkjet head movably attached to a sidewall of the gantry and configured to discharges ink toward the substrate.
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