| CPC B41J 2/14233 (2013.01) [H10N 30/2047 (2023.02); H10N 30/802 (2023.02); H10N 30/87 (2023.02)] | 19 Claims |
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1. A piezoelectric device comprising:
a substrate on which a plurality of recesses are arranged in a first direction, the plurality of recesses including a first recess;
a vibration plate; and
a piezoelectric actuator including a plurality of electrodes and a piezoelectric layer, and the plurality of electrodes including a first electrode, a second electrode, a third electrode, and a fourth electrode, wherein
the piezoelectric layer is stacked between the first electrode and the fourth electrode, between the second electrode and the fourth electrode, and between the third electrode and the fourth electrode,
a plurality of active portions in which the piezoelectric layer is interposed between the plurality of electrodes in a stacking direction are provided,
the vibration plate and the piezoelectric actuator are stacked in the stacking direction,
the second electrode and the third electrode are provided from an edge of a region facing the first recess to an outside of the first recess when viewed in the stacking direction at both ends of the first recess in the first direction,
the first electrode is formed between the second electrode and the third electrode in the first direction,
the fourth electrode configures a common electrode for the plurality of active portions, and
the fourth electrode and each of the first electrode, the second electrode, and the third electrode are arranged in the stacking direction, and the fourth electrode is located farther from the vibration plate than each of the first electrode, the second electrode, and the third electrode.
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