US 12,186,898 B2
Part transporting device and processing system
Kazuki Moyama, Miyagi (JP); Kazuya Nagaseki, Miyagi (JP); and Toshiya Matsuda, Fuchu (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed on Feb. 26, 2021, as Appl. No. 17/186,857.
Claims priority of application No. 2020-032566 (JP), filed on Feb. 28, 2020.
Prior Publication US 2021/0268670 A1, Sep. 2, 2021
Int. Cl. B25J 21/00 (2006.01); B25J 5/00 (2006.01); B25J 19/00 (2006.01)
CPC B25J 21/00 (2013.01) [B25J 5/007 (2013.01); B25J 19/0058 (2013.01)] 24 Claims
OG exemplary drawing
 
1. A part transporting device for transporting a consumable part, comprising:
a housing configured to accommodate an unused consumable part and a used consumable part;
a container having an opening to be connected to a processing device and a gate valve for opening or closing the opening, the container being configured to accommodate the housing;
a robot arm provided in the container and having at least one end effector at a tip end thereof, the robot arm transferring the used consumable part from the processing device through the opening to accommodate the used consumable part in the housing and transferring the unused consumable part from the housing to load the unused consumable part into the processing device through the opening;
a mobile body powered by a power source to move the part transporting device; and
a passage configured to introduce a purge gas for cleaning the at least one end effector into the container, the passage being connected to a gas supply of the processing device when the part transporting device is connected to the processing device.