US 12,186,887 B2
Collaborative robot system on a mobile cart with a chamber docking system
Vitali Brand, Milpitas, CA (US); Kamesh Venkata Gadepally, Campbell, CA (US); Jiawei Zhao, San Jose, CA (US); Dan Marohl, San Jose, CA (US); Niraj Vaghela, San Jose, CA (US); Heng Liu, Pleasanton, CA (US); Alexander James Walker, Tigard, OR (US); Zachary Jake Blum, San Francisco, CA (US); Matthew Christopher Clark, Oakland, CA (US); and Jessica Jeana Kim, San Jose, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/908,235
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed Mar. 2, 2021, PCT No. PCT/US2021/020552
§ 371(c)(1), (2) Date Aug. 30, 2022,
PCT Pub. No. WO2021/178458, PCT Pub. Date Sep. 10, 2021.
Claims priority of provisional application 62/984,772, filed on Mar. 3, 2020.
Prior Publication US 2024/0009856 A1, Jan. 11, 2024
Int. Cl. B25J 11/00 (2006.01); B25J 5/00 (2006.01); B25J 9/16 (2006.01)
CPC B25J 11/0085 (2013.01) [B25J 5/007 (2013.01); B25J 9/162 (2013.01)] 27 Claims
OG exemplary drawing
 
1. A robot system, comprising,
a cart frame;
an arm support frame fixed to the cart frame, the arm support frame is coupled to a robot arm used for servicing a semiconductor tool;
an arm frame extending from a first end to a second end, the first end is connected by hinges to the arm support frame and the second end has a fixture connect interface for connecting to a docking fixture of the semiconductor tool, the hinges enable the arm frame to rotate about the arm support frame; and
an arm locking mechanism is attached to the arm support frame for locking the arm frame when rotated to an extended position or a folded position;
wherein the fixture connect interface is configured to align the cart frame to the semiconductor tool when the arm frame is locked in the extended position, the alignment of the cart frame provides for corresponding alignment of the robot arm.