US 12,186,835 B2
Methods for laser processing coated substrates using a top-hat energy distribution
Sandra Hoehm, Munich (DE); and Uwe Stute, Neustadt am Rübenberge (DE)
Assigned to Corning Incorporated, Corning, NY (US)
Filed by CORNING INCORPORATED, Corning, NY (US)
Filed on May 26, 2021, as Appl. No. 17/330,896.
Claims priority of provisional application 63/037,126, filed on Jun. 10, 2020.
Prior Publication US 2021/0387288 A1, Dec. 16, 2021
Int. Cl. B23K 26/53 (2014.01); B23K 26/06 (2014.01); B23K 26/0622 (2014.01); B23K 26/073 (2006.01); B23K 26/082 (2014.01); B23K 26/18 (2006.01); B23K 101/34 (2006.01); B23K 103/00 (2006.01)
CPC B23K 26/53 (2015.10) [B23K 26/0622 (2015.10); B23K 26/0648 (2013.01); B23K 26/0734 (2013.01); B23K 26/082 (2015.10); B23K 26/18 (2013.01); B23K 2101/34 (2018.08); B23K 2103/54 (2018.08)] 19 Claims
OG exemplary drawing
 
1. A method of separating a coated substrate, the method comprising:
directing an infrared laser beam onto a first surface of the coated substrate wherein:
the coated substrate comprises a coating layer disposed on a transparent workpiece;
a plurality of defects is disposed within the coated substrate, extending into both the coating layer and the transparent workpiece and disposed along a contour line that divides a primary region of the coated substrate from a dummy region of the coated substrate; and
the infrared laser beam projects an infrared beam spot onto the first surface of the coated substrate; and
translating at least one of the coated substrate and the infrared laser beam relative to each other such that the infrared beam spot traces an oscillating pathway, wherein:
the oscillating pathway follows an offset line in a translation direction and oscillates between an inner track line and an outer track line, wherein each of the offset line, the inner track line, and the outer track line are disposed on the dummy region of the coated substrate such that the oscillating pathway is disposed entirely on the dummy region of the coated substrate and the offset line is parallel to and offset from the contour line; and
the infrared laser beam applies thermal energy to the plurality of defects disposed in the coated substrate and induces separation of the coated substrate along the contour line.