US 12,186,715 B2
Production method for resist composition purified product, resist pattern forming method, and resist composition purified product
Akihiko Nakata, Kawasaki (JP); Miku Abe, Kawasaki (JP); and Hiroki Saito, Kawasaki (JP)
Assigned to TOKYO OHKA KOGYO CO., LTD., Kanagawa (JP)
Appl. No. 17/611,412
Filed by TOKYO OHKA KOGYO CO., LTD., Kanagawa (JP)
PCT Filed May 20, 2020, PCT No. PCT/JP2020/019998
§ 371(c)(1), (2) Date Nov. 15, 2021,
PCT Pub. No. WO2020/235608, PCT Pub. Date Nov. 26, 2020.
Claims priority of application No. 2019-096193 (JP), filed on May 22, 2019.
Prior Publication US 2022/0242821 A1, Aug. 4, 2022
Int. Cl. B01D 71/64 (2006.01); B01D 67/00 (2006.01); B01D 69/12 (2006.01); C07C 381/12 (2006.01); G03F 7/004 (2006.01); G03F 7/038 (2006.01); G03F 7/20 (2006.01)
CPC B01D 71/641 (2022.08) [B01D 67/003 (2013.01); B01D 69/12 (2013.01); C07C 381/12 (2013.01); G03F 7/0045 (2013.01); G03F 7/0382 (2013.01); G03F 7/2004 (2013.01); B01D 2325/021 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A production method for a resist composition purified product, comprising:
(i) filtering a resist composition with a filter having a porous structure in which adjacent spherical cells are connected to each other,
wherein the filter has a porous membrane containing at least one resin selected from the group consisting of polyimide and polyamide imide,
wherein the resist composition contains a base material component (A) that exhibits changed solubility in a developing solution under action of acid, an onium salt, and an organic solvent component(S), where a content of the organic solvent component(S) is 97% by mass or more, and
wherein the onium salt contains a compound represented by General Formula (d1-1), (d1-2) or (d1-3):

OG Complex Work Unit Chemistry
wherein Rd1 to Rd4 represent cyclic groups which may have a substituent, chain-like alkyl groups which may have a substituent, or chain-like alkenyl groups which may have a substituent, the carbon atom adjacent to the S atom as Rd2 in General Formula (d1-2) has no fluorine atom bonded thereto; Yd1 represents a single bond or a divalent linking group; m represents an integer of 1 or more, and each Mm+ independently represents an m-valent organic cation.