CPC B01D 71/021 (2013.01) [B01D 53/228 (2013.01); B01D 67/0067 (2013.01); B01D 69/087 (2013.01); B01D 69/105 (2013.01); B01D 69/108 (2022.08); B01D 2256/245 (2013.01); B01D 2257/504 (2013.01); B01D 2323/12 (2013.01); B01D 2325/023 (2013.01)] | 10 Claims |
1. A carbon membrane for fluid separation use, the membrane including a dense carbon layer formed on a porous carbon support,
wherein the porous carbon support has a membrane thickness of 10 μm or more, and
wherein X<Y when a ratio of a content of silicon atoms to a total content of carbon atoms and silicon atoms at a center position of the porous carbon support in a membrane thickness direction of the porous carbon support is X (atomic %), and a ratio of a content of silicon atoms to a total content of carbon atoms and silicon atoms at a position of 3 μm from an interface between the porous carbon support and the dense carbon layer to a porous carbon support side is Y (atomic %).
|