US 11,856,681 B2
Target delivery system
Georgiy Olegovich Vaschenko, San Diego, CA (US); and Bob Rollinger, San Diego, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/421,055
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Jan. 9, 2020, PCT No. PCT/EP2020/050411
§ 371(c)(1), (2) Date Jul. 7, 2021,
PCT Pub. No. WO2020/148155, PCT Pub. Date Jul. 23, 2020.
Claims priority of provisional application 62/913,552, filed on Oct. 10, 2019.
Claims priority of provisional application 62/793,813, filed on Jan. 17, 2019.
Prior Publication US 2022/0061144 A1, Feb. 24, 2022
Int. Cl. H05G 2/00 (2006.01); G03F 7/00 (2006.01)
CPC H05G 2/006 (2013.01) [G03F 7/70033 (2013.01); H05G 2/008 (2013.01)] 27 Claims
OG exemplary drawing
 
1. A target delivery system for an extreme ultraviolet (EUV) light source, the system comprising:
a conduit comprising an orifice configured to fluidly couple to a reservoir;
an actuator configured to mechanically couple to the conduit such that motion of the actuator is transferred to the conduit; and
a control system coupled to the actuator, the control system being configured to:
determine an indication of pressure applied to target material in the reservoir, and
control the motion of the actuator based on the determined indication of applied pressure.