CPC H05G 2/006 (2013.01) [G03F 7/70033 (2013.01); H05G 2/008 (2013.01)] | 27 Claims |
1. A target delivery system for an extreme ultraviolet (EUV) light source, the system comprising:
a conduit comprising an orifice configured to fluidly couple to a reservoir;
an actuator configured to mechanically couple to the conduit such that motion of the actuator is transferred to the conduit; and
a control system coupled to the actuator, the control system being configured to:
determine an indication of pressure applied to target material in the reservoir, and
control the motion of the actuator based on the determined indication of applied pressure.
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