CPC H03H 9/14541 (2013.01) [H03H 3/08 (2013.01); H03H 9/02559 (2013.01); H03H 9/02937 (2013.01); H03H 9/25 (2013.01)] | 12 Claims |
1. An electro-acoustic resonator, comprising:
a substrate, the substrate having piezoelectric properties; and
an electrode structure disposed on the substrate, the electrode structure comprising:
a metal layer, the metal layer comprising aluminum and copper, wherein, within the metal layer, a mass of the copper is substantially equal to a mass of the aluminum;
a barrier layer disposed on the metal layer and configured to form a barrier against a diffusion of copper; and
another metal layer disposed on the barrier layer, the other metal layer comprising aluminum.
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