CPC H01L 27/0262 (2013.01) | 19 Claims |
1. A structure comprising:
a plurality of regions of a first dopant type;
insulator material separating each region of the plurality of regions of the first dopant type;
a substrate contacting the plurality of regions of the first dopant type, the substrate comprising a base region of a second dopant type different than the first dopant type and an L-shaped outer segment surrounding the plurality of regions of the first dopant type, the L-shaped outer segment comprises an electrical resistivity higher than other portions of the base region; and
a shallow trench isolation structure confined between both legs of the L-shaped outer segment and an outer one of the plurality of regions of the first dopant type.
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