US 11,854,852 B2
Substrate chuck for self-assembling semiconductor light-emitting diodes
Inbum Yang, Seoul (KR); Junghun Rho, Seoul (KR); Imdeok Jung, Seoul (KR); and Bongwoon Choi, Seoul (KR)
Assigned to LG ELECTRONICS INC., Seoul (KR)
Filed by LG ELECTRONICS INC., Seoul (KR)
Filed on Mar. 13, 2020, as Appl. No. 16/818,222.
Claims priority of application No. 10-2019-0115574 (KR), filed on Sep. 19, 2019; and application No. 10-2019-0120057 (KR), filed on Sep. 27, 2019.
Prior Publication US 2021/0090928 A1, Mar. 25, 2021
Int. Cl. H01L 21/68 (2006.01); H01L 21/677 (2006.01); H01L 25/075 (2006.01); H01L 33/00 (2010.01)
CPC H01L 21/68 (2013.01) [H01L 21/67709 (2013.01); H01L 25/0753 (2013.01); H01L 33/0095 (2013.01); H01L 2933/005 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A substrate chuck used for placing semiconductor light-emitting diodes dispersed in a fluid at predetermined positions of a substrate, the substrate chuck comprising:
a substrate support part for supporting the substrate having an assembly electrode;
a vertical moving part which moves the substrate so that one surface of the substrate comes in contact with the fluid in a state in which the substrate is supported by the substrate support;
an electrode connection part configured to apply power to the assembly electrode to generate an electric field so that the semiconductor light-emitting diodes are placed at the predetermined positions of the substrate in a process of moving the semiconductor light-emitting diodes by a position change of at least one magnet; and
a rotating part configured to rotate the substrate support part around a rotating shaft so that the substrate is placed in an upward or downward direction,
wherein the rotating shaft is spaced apart from a center of the substrate support part at a predetermined distance,
wherein the substrate support part comprises:
first and second frames for fixing the substrate from opposite directions; and
a fixing part having a sidewall part for fixing the first and second frames thereto, and
wherein the rotating shaft is disposed at one end of the sidewall part of the fixing part.