US 11,854,847 B2
Reticle pod with spoiler structure
Chia-Ho Chuang, New Taipei (TW); Hsin-Min Hsueh, New Taipei (TW); Shu-Hung Lin, New Taipei (TW); and Ming-Chien Chiu, New Taipei (TW)
Assigned to GUDENG PRECISION INDUSTRIAL CO., LTD., New Taipei (TW)
Filed by GUDENG PRECISION INDUSTRIAL CO., LTD., New Taipei (TW)
Filed on Sep. 6, 2019, as Appl. No. 16/562,513.
Claims priority of application No. 108113242 (TW), filed on Apr. 16, 2019.
Prior Publication US 2020/0335371 A1, Oct. 22, 2020
Int. Cl. H01L 21/673 (2006.01)
CPC H01L 21/67359 (2013.01) [H01L 21/67386 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A reticle pod with a spoiler structure, comprising:
a body which a reticle allocation area is centrally disposed at; and
a cover for covering the body, wherein a peripheral area of the cover and a peripheral area of the body are fitted together by a protruding portion and a dented portion, and the spoiler structure surrounding the reticle allocation area is jointly formed by the dented portion and the protruding portion,
wherein the spoiler structure comprises a spoiler passage disposed between the dented portion and the protruding portion, and the body has at least one sidewall in the spoiler passage, and the sidewall is at an acute angle of less than 90 degree and sloping at an inward incline slope to form a particle-collecting space, and
wherein the protruding portion is received in the dented portion, and the spoiler passage extends continuously along the protruding portion to the cover at both ends of the spoiler passage.