CPC H01L 21/28556 (2013.01) [C23C 16/14 (2013.01); C23C 16/4408 (2013.01); C23C 16/45553 (2013.01)] | 10 Claims |
1. A method of depositing a film, the method comprising:
exposing a substrate to a molybdenum halide precursor and an aluminum precursor to form a molybdenum film on the substrate, wherein the substrate is exposed to the molybdenum halide precursor and the aluminum precursor simultaneously.
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