US 11,853,682 B2
Systems and methods for identification and elimination of geometrical design rule violations of a mask layout block
Danny Rittman, San Diego, CA (US); and Mo Jacob, Beverly Hills, CA (US)
Assigned to GBT Tokenize Corp., Santa Monica, CA (US)
Filed by GBT Technologies Inc., Santa Monica, CA (US)
Filed on Aug. 2, 2021, as Appl. No. 17/391,292.
Claims priority of provisional application 63/197,635, filed on Jun. 7, 2021.
Prior Publication US 2022/0390831 A1, Dec. 8, 2022
Int. Cl. G06F 30/398 (2020.01); G03F 1/70 (2012.01); G06F 30/31 (2020.01)
CPC G06F 30/398 (2020.01) [G03F 1/70 (2013.01); G06F 30/31 (2020.01)] 22 Claims
OG exemplary drawing
 
1. A computer-implemented method of eliminating geometrical design rule violations of a mask layout block, comprising:
comparing a feature dimension in a mask layout data file with a reliability verification-aware design rule in a reference rule file, the feature dimension being dependent on reliability constraints including one or more of: electromigration, self-heat, and IR drop;
identifying a design rule violation of a mask layout block if the feature dimension does not match the reliability verification-aware design rule; and
automatically correcting the design rule violation by modifying the feature dimension such that the feature dimension matches the reliability verification-aware design rule, matches dependency rules, and maintains reliability verification.