CPC G06F 30/398 (2020.01) [G03F 1/70 (2013.01); G06F 30/31 (2020.01)] | 22 Claims |
1. A computer-implemented method of eliminating geometrical design rule violations of a mask layout block, comprising:
comparing a feature dimension in a mask layout data file with a reliability verification-aware design rule in a reference rule file, the feature dimension being dependent on reliability constraints including one or more of: electromigration, self-heat, and IR drop;
identifying a design rule violation of a mask layout block if the feature dimension does not match the reliability verification-aware design rule; and
automatically correcting the design rule violation by modifying the feature dimension such that the feature dimension matches the reliability verification-aware design rule, matches dependency rules, and maintains reliability verification.
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