US 11,852,972 B2
Photoresist compositions and pattern formation methods
Tomas Marangoni, Marlborough, MA (US); Emad Aqad, Northborough, MA (US); James W. Thackeray, Braintree, MA (US); James F. Cameron, Brookline, MA (US); Xisen Hou, Lebanon, NH (US); and ChoongBong Lee, Westborough, MA (US)
Assigned to ROHM AND HAAS ELECTRONIC MATERIALS LLC, Marlborough, MA (US)
Filed by ROHM AND HAAS ELECTRONIC MATERIALS LLC, Marlborough, MA (US)
Filed on Oct. 30, 2020, as Appl. No. 17/084,993.
Prior Publication US 2022/0137506 A1, May 5, 2022
Int. Cl. G03F 7/004 (2006.01); G03F 7/30 (2006.01); G03F 7/20 (2006.01)
CPC G03F 7/0045 (2013.01) [G03F 7/2004 (2013.01); G03F 7/2041 (2013.01); G03F 7/30 (2013.01)] 17 Claims
 
1. A photoresist composition, comprising:
an acid-sensitive polymer comprising a repeating unit having an acid-labile group;
an iodonium salt comprising an anion and a cation, wherein the cation comprises one, and not more than one, iodonium cation, the iodonium salt having Formula (1):

OG Complex Work Unit Chemistry
wherein,
Z− is an organic anion comprising a group chosen from sulfonate, a methide anion, an anion of a sulfonamide, an anion of a sulfonimide, a sulfamate, a phenolate, or carboxylate;
Ar1 is a substituted or unsubstituted C4-60 heteroaryl group comprising a furan heterocycle; and
R1 is a C1-20 alkyl group, a C1-20 heteroalkyl group, a C3-20 cycloalkyl group, a C2-20 heterocycloalkyl group, a C2-20 alkenyl group, a C2-20 heteroalkenyl group, a C6-30 aryl group, a C4-30 heteroaryl group, a C7-20 arylalkyl group, or a C4-20 heteroarylalkyl group, each of which is substituted or unsubstituted,
wherein the cation optionally comprises an acid-labile group,
wherein Ar1 and R1 are optionally connected to each other via a single bond or one or more divalent linking groups to form a ring, and
wherein the iodonium salt is optionally covalently bonded through Ar1 or through a substituent thereof as a pendant group to a polymer, the iodonium salt is optionally covalently bonded through R1 or through a substituent thereof as a pendant group to a polymer, or the iodonium salt is optionally covalently bonded through Z− as a pendant group to a polymer; and
a solvent.