US 11,852,867 B2
Photonic devices integrated with reflectors
Yusheng Bian, Ballston Lake, NY (US); Bo Peng, Malta, NY (US); and Michal Rakowski, Malta, NY (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GLOBALFOUNDRIES U.S. Inc., Santa Clara, CA (US)
Filed on Nov. 9, 2021, as Appl. No. 17/454,063.
Application 17/454,063 is a division of application No. 16/817,582, filed on Mar. 12, 2020, granted, now 11,243,350.
Prior Publication US 2022/0057576 A1, Feb. 24, 2022
Int. Cl. G02B 6/122 (2006.01); G02B 6/12 (2006.01)
CPC G02B 6/1225 (2013.01) [G02B 2006/1213 (2013.01); G02B 2006/12104 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A semiconductor device comprising:
a substrate;
a photonic component arranged above the substrate;
a first bottom reflector arranged above the substrate and positioned below the photonic component; and
a second bottom reflector arranged vertically between the first bottom reflector and the photonic component, wherein the first bottom reflector and the second bottom reflector have a plurality of grating structures configured to reflect electromagnetic waves towards the photonic component, and wherein the grating structures in the first bottom reflector have top surfaces, and the grating structures in the second bottom reflector is directly on the top surfaces of the grating structures in the first bottom reflector.