CPC C23C 16/45555 (2013.01) [B22F 1/0547 (2022.01); B22F 1/16 (2022.01); C23C 16/08 (2013.01); C23C 16/403 (2013.01); C23C 16/45525 (2013.01); D01D 5/003 (2013.01); D02G 3/16 (2013.01); B82Y 25/00 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01)] | 7 Claims |
1. A method of forming a coated nanofiber, comprising:
forming a magnetic nanofiber by:
forming a solution with metal salts and a polymer, and
electrospinning the solution to form a magnetic nanofiber;
reducing the magnetic nanofiber prior to depositing the first material on the magnetic nanofiber;
placing the magnetic nanofiber in a reactor; and
after reducing, depositing a barrier coating on the magnetic nanofiber by atomic layer deposition (“ALD”) process including at least one cycle of:
pulsing a first metal precursor for a first metal precursor pulse time,
exposing a base material of the magnetic nanofiber to the first metal precursor for a first metal precursor exposure time and at a first partial pressure, the first metal precursor binding with the base material,
purging the reactor of the first metal precursor,
pulsing a co-reactant precursor into the reactor for a first co-reactant pulse time;
exposing the base material to the co-reactant precursor for a co-reactant precursor exposure time and at a second partial pressure, and
purging the reactor of the co-reactant precursor.
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