US 11,851,757 B2
Creating and protecting magnetic nanomaterials
Anil U. Mane, Naperville, IL (US); Yuepeng Zhang, Naperville, IL (US); Devika Choudhury, Naperville, IL (US); Jeffrey W. Elam, Elmhurst, IL (US); Kaizhong Gao, North Oaks, MN (US); and John N. Hryn, Hawthorn Woods, IL (US)
Assigned to UCHICAGO ARGONNE, LLC, Chicago, IL (US)
Filed by UCHICAGO ARGONNE, LLC, Chicago, IL (US)
Filed on Jan. 30, 2020, as Appl. No. 16/776,702.
Prior Publication US 2021/0238769 A1, Aug. 5, 2021
Int. Cl. C23C 16/455 (2006.01); D01D 5/00 (2006.01); D02G 3/16 (2006.01); C23C 16/08 (2006.01); C23C 16/40 (2006.01); B22F 1/054 (2022.01); B22F 1/16 (2022.01); B82Y 25/00 (2011.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01)
CPC C23C 16/45555 (2013.01) [B22F 1/0547 (2022.01); B22F 1/16 (2022.01); C23C 16/08 (2013.01); C23C 16/403 (2013.01); C23C 16/45525 (2013.01); D01D 5/003 (2013.01); D02G 3/16 (2013.01); B82Y 25/00 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A method of forming a coated nanofiber, comprising:
forming a magnetic nanofiber by:
forming a solution with metal salts and a polymer, and
electrospinning the solution to form a magnetic nanofiber;
reducing the magnetic nanofiber prior to depositing the first material on the magnetic nanofiber;
placing the magnetic nanofiber in a reactor; and
after reducing, depositing a barrier coating on the magnetic nanofiber by atomic layer deposition (“ALD”) process including at least one cycle of:
pulsing a first metal precursor for a first metal precursor pulse time,
exposing a base material of the magnetic nanofiber to the first metal precursor for a first metal precursor exposure time and at a first partial pressure, the first metal precursor binding with the base material,
purging the reactor of the first metal precursor,
pulsing a co-reactant precursor into the reactor for a first co-reactant pulse time;
exposing the base material to the co-reactant precursor for a co-reactant precursor exposure time and at a second partial pressure, and
purging the reactor of the co-reactant precursor.