| CPC B24B 55/02 (2013.01) | 3 Claims |
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1. A grinding apparatus comprising:
a chuck table configured and arranged to hold a workpiece on a holding surface;
a grinding unit including a mount and a grinding wheel that has grindstones arranged in an annular pattern on a wheel base of the grinding wheel, wherein the grinding wheel is connected to an end of the mount, and wherein the grinding wheel is configured and arranged to be rotated about an axis, defined as the center of the wheel base, to grind the workpiece held on the holding surface;
a grinding feeding mechanism configured and arranged to move the grinding unit in a vertical direction perpendicular to the holding surface; and
a grinding water supply unit configured and arranged to supply grinding water to a processing area where an upper surface of the workpiece held on the holding surface and a lower surface of the grindstones make contact with each other,
wherein the grinding water supply unit includes:
a nozzle configured and arranged to jet the grinding water to the grindstones, and
a biasing mechanism configured and arranged to bias the nozzle upward,
wherein the nozzle is configured to be movable in a downward direction against the bias from the biasing mechanism in association with downward movement of the grinding unit, and
wherein the grinding apparatus includes an upper limit stopping section configured and arranged for setting an upper limit position for upward movement of the nozzle when biased upward upwardly by the biasing mechanism, wherein the upper limit stopping section forms a gap through which the grinding wheel is passed, wherein the gap is defined between the nozzle when biased upwardly by the biasing mechanism and the mount of the grinding unit.
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