US 11,850,629 B2
Piezoelectric sensor assembly and manufacturing method thereof, display panel and electronic device
Chenyang Zhang, Beijing (CN); Yingming Liu, Beijing (CN); Haisheng Wang, Beijing (CN); Peixiao Li, Beijing (CN); Xiufeng Li, Beijing (CN); Yuzhen Guo, Beijing (CN); Yanling Han, Beijing (CN); and Lijun Zhao, Beijing (CN)
Assigned to BOE Technology Group Co., Ltd., Beijing (CN)
Appl. No. 17/253,659
Filed by BOE Technology Group Co., Ltd., Beijing (CN)
PCT Filed May 25, 2020, PCT No. PCT/CN2020/092089
§ 371(c)(1), (2) Date Dec. 18, 2020,
PCT Pub. No. WO2020/253473, PCT Pub. Date Dec. 24, 2020.
Claims priority of application No. 201910529664.X (CN), filed on Jun. 18, 2019.
Prior Publication US 2021/0331204 A1, Oct. 28, 2021
Int. Cl. B06B 1/06 (2006.01); G01D 5/62 (2006.01); G06F 3/043 (2006.01)
CPC B06B 1/0607 (2013.01) [B06B 1/067 (2013.01); G01D 5/62 (2013.01); G06F 3/043 (2013.01); B06B 2201/55 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A piezoelectric sensor assembly, comprising:
a base substrate;
a plurality of ultrasonic transducers, wherein a spacing area is provided between two adjacent ultrasonic transducers; and
an acoustic matching layer, wherein the acoustic matching layer comprises a plurality of acoustic matching areas, and an orthographic projection of at least one acoustic matching area on the base substrate falls into an orthographic projection of the ultrasonic transducer corresponding to the acoustic matching area on the base substrate,
wherein an isolation cavity is provided between two adjacent acoustic matching areas; and
wherein the piezoelectric sensor further comprises: a pore layer on a side of the acoustic matching layer away from the base substrate.