US 11,838,693 B2
MEMS control method to provide trajectory control
Gregory Theodore Gibson, Seattle, WA (US); and Algird Michael Gudaitis, Fall City, WA (US)
Assigned to Microsoft Technology Licensing, LLC, Redmond, WA (US)
Filed by MICROSOFT TECHNOLOGY LICENSING, LLC, Redmond, WA (US)
Filed on May 20, 2021, as Appl. No. 17/326,027.
Application 17/326,027 is a continuation of application No. 16/421,241, filed on May 23, 2019, granted, now 11,039,111.
Prior Publication US 2021/0286169 A1, Sep. 16, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H04N 9/31 (2006.01); G02B 26/08 (2006.01); G01L 1/18 (2006.01); G02B 26/10 (2006.01); G09G 3/02 (2006.01)
CPC H04N 9/3135 (2013.01) [G01L 1/18 (2013.01); G02B 26/0833 (2013.01); G02B 26/101 (2013.01); G09G 3/02 (2013.01); H04N 9/3129 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of controlling a mirror in a MEMS based projector, the method comprising iteratively performing the following:
inputting a time domain target wave array, with target elements, to a system for a MEMS coupled to the mirror of the projector, the time domain target wave array comprising a set of n target elements;
driving a driver to move the mirror using elements in a drive array comprising a set of drive elements;
sampling a time domain output wave for movement of the mirror to construct an output wave array with output elements corresponding to the target elements;
identifying one or more modifications to make to the drive elements in the drive array by calculating errors between the target elements and the output elements based on an impulse response for each output element determined by individually driving the input of the driver with an impulse input for each of the drive elements in the drive array; and
modifying the drive elements in the drive array based on the identified one or more modifications to make to the drive elements in the drive array.