CPC H01S 3/0057 (2013.01) [G02B 17/023 (2013.01); G02B 17/0657 (2013.01); G03F 7/70191 (2013.01); H01S 3/0014 (2013.01); H01S 3/2308 (2013.01)] | 12 Claims |
1. A laser device, comprising:
a master oscillator configured to output pulse laser light;
a first optical pulse stretcher which includes a first delay optical system including a plurality of concave toroidal mirrors, and a beam splitter including a first surface and a second surface, causing a part of pulse laser light incident on the first surface to be transmitted in a first direction and output as a first beam and another part thereof to be reflected in a second direction and enter the first delay optical system, and causing a part of pulse laser light incident on the second surface from the first delay optical system to be reflected in the first direction and output as a second beam, and which is arranged on an optical path of pulse laser light output from the master oscillator; and
a second optical pulse stretcher arranged on an optical path of pulse laser light output from the master oscillator,
wherein the second optical pulse stretcher includes a second delay optical system including a plurality of concave toroidal mirrors, and a beam splitter including a third surface and a fourth surface, causing a part of pulse laser light incident on the third surface to be transmitted in a third direction and output as a first beam and another part thereof to be reflected in a fourth direction and enter the second delay optical system, and causing a part of pulse laser light incident on the fourth surface from the second delay optical system to be reflected in the third direction and output as a second beam, and
an optical path length of a delay optical path configured by the first delay optical system is different from an optical path length of a delay optical path configured by the second delay optical system.
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