CPC H01L 21/6833 (2013.01) | 20 Claims |
1. An electrostatic chuck, comprising:
a workpiece support surface configured to support a workpiece during processing; and
a clamping layer including one or more clamping electrodes, the clamping layer including:
a first clamping electrode defining a first clamping zone and a second clamping zone, the first clamping zone and the second clamping zone being separated by a first gap, the first clamping zone and the second clamping zone being electrically connected by at least one electrical connection extending across the first gap; and
a second clamping electrode disposed radially outward from the first clamping electrode, the second clamping electrode defining a third clamping zone and a fourth clamping zone, the third clamping zone and the fourth clamping zone being separated by a second gap, the third clamping zone and the fourth clamping zone being electrically connected by at least one electrical connection extending across the second gap.
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