US 11,837,436 B2
Waveform generating device, waveform generating method, and charged particle beam irradiation apparatus
Michihiko Ikeda, Ota-ku (JP); Akinori Mine, Yokohama (JP); and Kuniaki Kawahara, Yokohama (JP)
Assigned to NuFlare Technology, Inc., Yokohama (JP)
Filed by NuFlare Technology, Inc., Yokohama (JP)
Filed on Dec. 27, 2021, as Appl. No. 17/646,067.
Claims priority of application No. 2021-016707 (JP), filed on Feb. 4, 2021.
Prior Publication US 2022/0246396 A1, Aug. 4, 2022
Int. Cl. H01J 37/302 (2006.01); H03M 1/06 (2006.01); H01J 37/147 (2006.01)
CPC H01J 37/302 (2013.01) [H01J 37/147 (2013.01); H03M 1/0604 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A waveform generating device comprising:
a first DA converter converting input data from digital to analog and provide an output;
a controller outputting a first signal having a command value based on the input data, and a second signal having a command value differing by a constant value from the command value of the first signal;
a second DA converter converting the first signal from digital to analog and provide an output;
a third DA converter converting the second signal from digital to analog and provide an output; and
a combiner combining the output of the first DA converter, the output of the second DA converter, and the output of the third DA converter,
wherein when a value of a predetermined first high-order bit of the input data is inverted, the controller changes the command value of the first signal such that a value of the first high-order bit or a second high-order bit different from the first high-order bit is inverted.