US 11,835,869 B2
Exposure apparatus, exposure method, and method of manufacturing article
Kazuki Ota, Tochigi (JP); Takafumi Miyaharu, Tochigi (JP); Yuki Saito, Tochigi (JP); and Masaki Imai, Saitama (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Dec. 6, 2022, as Appl. No. 18/062,072.
Claims priority of application No. 2021-203601 (JP), filed on Dec. 15, 2021.
Prior Publication US 2023/0185205 A1, Jun. 15, 2023
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70725 (2013.01) [G03F 7/70641 (2013.01); G03F 7/70775 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An exposure apparatus for exposing a substrate via an original, the exposure apparatus comprising:
a substrate stage configured to hold the substrate;
an obtainment unit configured to obtain, for each of a plurality of exposure regions to be exposed on the substrate, surface positions in a height direction at a plurality of measurement points in the respective exposure region; and
a control unit configured to control, based on the surface positions obtained by the obtainment unit, driving of the substrate stage in the height direction during while exposing each of the plurality of exposure regions, wherein the control unit:
obtains, for each of the plurality of exposure regions, an approximate surface approximately representing a cross-sectional shape of a surface of the respective exposure region from the surface positions obtained by the obtainment unit;
among the plurality of exposure regions, for a first exposure region for which information related to a first approximate surface of the first exposure region does not exceed a predetermined range, controls the driving based on a first correction value related to the driving obtained from a previous approximate surface approximately representing the cross-sectional shape of the surface of the exposure region that has been exposed before the first exposure region; and
among the plurality of exposure regions, for a second exposure region for which information related to a second approximate surface of the second exposure region exceeds the predetermined range, controls the driving based on a second correction value related to the driving obtained from the second approximate surface approximately representing the cross-sectional shape of the surface of the second exposure region.