CPC G02F 1/292 (2013.01) [G01J 9/00 (2013.01); G01J 2009/002 (2013.01); G02F 2203/18 (2013.01)] | 18 Claims |
1. A deformable mirror, comprising:
a plurality of cells defining an aperture plane of the deformable mirror, each cell comprising:
a first electrode layer positioned on a target side of the cell, wherein the first electrode layer comprises transparent electrodes;
a second electrode layer positioned on a reflection side of the cell, wherein the second electrode layer comprises reflective electrodes;
an electro-optical (EO) active layer comprising a solid EO crystal responsive to an applied voltage to adjust an optical characteristic of the solid EO crystal, wherein at least two of the plurality of cells share a substrate comprising the solid EO crystal of the EO active layer; and
a reflective layer optically coupled to each of the plurality of cells on the reflection side of the cell.
|