CPC G02B 6/136 (2013.01) [G01S 7/4816 (2013.01); G02B 2006/12061 (2013.01); G02B 2006/12107 (2013.01)] | 20 Claims |
1. A method for fabricating a silicon photonics device in a LIDAR sensor system for a vehicle, the method comprising:
obtaining a substrate member and forming a first silicon structure that is coupled to the substrate member;
forming a first oxide layer on the first silicon structure;
forming a metal layer on the first oxide layer and the first silicon structure; and
forming an adhesion layer on the metal layer, the adhesion layer configured to act as a diffusion barrier and adhere to the metal layer, the adhesion layer and the metal layer forming a reflective mirror structure in the silicon photonics device.
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