US 11,835,628 B2
Time-of-flight image sensor
Minseok Oh, San Jose, CA (US); and Satyadev Hulikal Nagaraja, San Jose, CA (US)
Assigned to Microsoft Technology Licensing, LLC, Redmond, WA (US)
Filed by Microsoft Technology Licensing, LLC, Redmond, WA (US)
Filed on Nov. 2, 2020, as Appl. No. 17/086,768.
Prior Publication US 2022/0137222 A1, May 5, 2022
Int. Cl. G01S 7/48 (2006.01); G01S 17/894 (2020.01); G01S 7/4865 (2020.01); G01S 7/486 (2020.01); H01L 27/148 (2006.01); G02B 3/00 (2006.01)
CPC G01S 17/894 (2020.01) [G01S 7/4865 (2013.01); G01S 7/4868 (2013.01); H01L 27/14812 (2013.01); H01L 27/14856 (2013.01); G02B 3/0006 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A time-of-flight image sensor comprising:
an array of pixels, each pixel of the array comprising:
a first photogate;
a second photogate adjacent the first photogate;
an isolation barrier intermediate the first photogate and the second photogate; and
an in-pixel ground node intermediate the first photogate and the second photogate.