CPC G01Q 20/02 (2013.01) [G01B 9/02 (2013.01); G01Q 30/18 (2013.01); G02B 21/0032 (2013.01); G01Q 60/24 (2013.01); Y10S 33/04 (2013.01)] | 25 Claims |
1. An apparatus for providing radiation to at least one sample, comprising:
a radiation source arrangement configured to provide a radiation;
a beam splitter configured to split the radiation into (i) a first radiation, and (ii) a second radiation; and
an optical element which, in operation:
receives the first radiation and the second radiation,
reflects the first radiation as a reference radiation,
provides the second radiation as illumination for the at least one sample,
receives a resultant radiation from the at least one sample that is based on the illumination from the second radiation, and
provides the reference radiation and the resultant radiation to be detected and used for at least one of interferometric imaging or spectroscopy.
|