CPC G01L 9/0022 (2013.01) [G01L 19/086 (2013.01); H03H 9/174 (2013.01)] | 24 Claims |
1. A pressure-sensitive acoustic resonator, comprising:
a conductor pattern on a planar surface of a non-piezoelectric substrate, the conductor pattern including an interdigital conductor pattern (ICP); and
a piezoelectric diaphragm having a front surface exposed to an environment and a back surface facing, but not contacting, the ICP, such that the back surface of the piezoelectric diaphragm is separated from the ICP by a gap,
wherein the piezoelectric diaphragm does not include a conductor pattern directly disposed on either the front surface or the back surface thereof,
wherein the conductor pattern comprises a single set of interleaved fingers on one surface of the non-piezoelectric substrate, and
wherein the acoustic resonator is configured as a film bulk acoustic resonator.
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