CPC C23C 16/448 (2013.01) [B01J 7/00 (2013.01); C23C 16/455 (2013.01); B01J 2208/0061 (2013.01); B01J 2208/00539 (2013.01); B01J 2208/00884 (2013.01)] | 14 Claims |
1. An apparatus comprising:
a canister having a sidewall, a top, and a bottom forming a canister volume;
an inlet line and an outlet line coupled to the top and in fluid communication with the canister volume;
a plate disposed within the canister volume forming a headspace volume below the plate, the inlet line and the outlet line each in fluid communication with the headspace volume; and
one or more standoffs extending from a lower surface of the plate, wherein the one or more standoffs comprise a lower surface area substantially parallel with the plate.
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