US 11,834,740 B2
Apparatus, system, and method for generating gas for use in a process chamber
David Marquardt, Tempe, AZ (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Nov. 10, 2020, as Appl. No. 17/094,208.
Prior Publication US 2022/0145454 A1, May 12, 2022
Int. Cl. C23C 16/40 (2006.01); C23C 16/448 (2006.01); C23C 16/455 (2006.01); B01J 7/00 (2006.01)
CPC C23C 16/448 (2013.01) [B01J 7/00 (2013.01); C23C 16/455 (2013.01); B01J 2208/0061 (2013.01); B01J 2208/00539 (2013.01); B01J 2208/00884 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a canister having a sidewall, a top, and a bottom forming a canister volume;
an inlet line and an outlet line coupled to the top and in fluid communication with the canister volume;
a plate disposed within the canister volume forming a headspace volume below the plate, the inlet line and the outlet line each in fluid communication with the headspace volume; and
one or more standoffs extending from a lower surface of the plate, wherein the one or more standoffs comprise a lower surface area substantially parallel with the plate.