US 11,834,737 B2
Titanium alloy coating film and titanium alloy target material
Hiromasa Takeda, Miyagi (JP); Wataru Araki, Miyagi (JP); Kazuya Sakaguchi, Nagoya (JP); Katsuko Ofuji, Nagoya (JP); Jun Totsuka, Nagoya (JP); and Kazuki Minami, Nagoya (JP)
Assigned to DAIDO STEEL CO., LTD., Nagoya (JP)
Appl. No. 16/089,241
Filed by DAIDO STEEL CO., LTD., Nagoya (JP)
PCT Filed Mar. 29, 2017, PCT No. PCT/JP2017/012810
§ 371(c)(1), (2) Date Sep. 27, 2018,
PCT Pub. No. WO2017/170639, PCT Pub. Date Oct. 5, 2017.
Claims priority of application No. 2016-066573 (JP), filed on Mar. 29, 2016; and application No. 2017-057131 (JP), filed on Mar. 23, 2017.
Prior Publication US 2020/0308689 A1, Oct. 1, 2020
Int. Cl. C23C 14/00 (2006.01); C23C 14/06 (2006.01); C23C 14/34 (2006.01); C22C 14/00 (2006.01)
CPC C23C 14/0641 (2013.01) [C22C 14/00 (2013.01); C23C 14/3414 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A titanium alloy coating film represented by (Ti1-aMoa)1-xNx,
wherein each of a and x represents an atom ratio, the titanium alloy coating film as a whole satisfies 0.04≤a≤0.32 and 0.40≤x≤0.60,
wherein a film hardness of the titanium alloy coating film satisfies at least a condition of 3,000 HV or more, and
wherein a diffraction peak intensity in a plane of (111) of TiN obtained by an X-ray diffraction profile measurement is higher than a diffraction peak intensity in a plane of (200) of TiN.