CPC C23C 14/0641 (2013.01) [C22C 14/00 (2013.01); C23C 14/3414 (2013.01)] | 6 Claims |
1. A titanium alloy coating film represented by (Ti1-aMoa)1-xNx,
wherein each of a and x represents an atom ratio, the titanium alloy coating film as a whole satisfies 0.04≤a≤0.32 and 0.40≤x≤0.60,
wherein a film hardness of the titanium alloy coating film satisfies at least a condition of 3,000 HV or more, and
wherein a diffraction peak intensity in a plane of (111) of TiN obtained by an X-ray diffraction profile measurement is higher than a diffraction peak intensity in a plane of (200) of TiN.
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