US 11,834,603 B2
Heat dissipation sheet, heat dissipation member, and semiconductor device
Toshiyuki Sawamura, Tokyo (JP); Toshiyuki Tanaka, Tokyo (JP); Akira Watanabe, Tokyo (JP); and Katsuhiko Hidaka, Tokyo (JP)
Assigned to Mitsubishi Chemical Corporation, Tokyo (JP)
Filed by Mitsubishi Chemical Corporation, Tokyo (JP)
Filed on Sep. 16, 2020, as Appl. No. 17/022,305.
Application 17/022,305 is a continuation of application No. PCT/JP2019/013966, filed on Mar. 29, 2019.
Claims priority of application No. 2018-068075 (JP), filed on Mar. 30, 2018; application No. 2018-068471 (JP), filed on Mar. 30, 2018; and application No. 2019-046007 (JP), filed on Mar. 13, 2019.
Prior Publication US 2020/0407618 A1, Dec. 31, 2020
Int. Cl. C08K 3/38 (2006.01); C08K 7/18 (2006.01); H01L 23/373 (2006.01); C09K 5/14 (2006.01); C08K 3/22 (2006.01); H01L 23/36 (2006.01)
CPC C09K 5/14 (2013.01) [C08K 3/22 (2013.01); C08K 3/38 (2013.01); C08K 7/18 (2013.01); H01L 23/36 (2013.01); H01L 23/3733 (2013.01); H01L 23/3737 (2013.01); C08K 2003/2227 (2013.01); C08K 2003/385 (2013.01); C08K 2201/001 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A heat dissipation sheet, comprising:
cohesive inorganic filler particles; and
a resin,
wherein a breaking strength of the cohesive inorganic filler particles is 20 MPa or lower, and a modulus of elasticity of the cohesive inorganic filler particles is 48 MPa or higher, and
wherein half or more of the cohesive inorganic filler particles included in the heat dissipation sheet satisfy the following conditions A and B, and the cohesive inorganic filler particles satisfying the following conditions A and B satisfy the following condition C
Condition A: cohesive inorganic filler particles are in surface contact with each other
Condition B: an aspect ratio expressed by a ratio of a major diameter to a minor diameter (major diameter/minor diameter) is within a range of a number larger than 1 and less than or equal to 2
Condition C: in an observation of a cross section of the heat dissipation sheet in a thickness direction, in triangles formed to have one side which is a straight line constituted by a contact interface between cohesive inorganic filler particles and an apex which is a center of a virtual circle having a largest diameter of the cohesive inorganic filler particle as a diameter, a sum St of areas of triangles in which an angle θ1 formed by connecting both ends of the straight line to the apex becomes 30 degrees or larger is 20% or more with respect to a sum Sh of cross-sectional areas of the cohesive inorganic filler particles.