| CPC B81B 3/0021 (2013.01) [B81B 2201/0235 (2013.01); B81B 2201/0271 (2013.01); B81B 2201/0278 (2013.01); B81B 2203/04 (2013.01); B81B 2203/06 (2013.01)] | 20 Claims |
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1. A sensor, comprising:
a first detection element including
a base body,
a first support member fixed to the base body,
a conductive first movable member, and
a first conductive part fixed to the base body,
the first movable member including a first movable part, a second movable part, a third movable part, a fourth movable part and a fifth movable part,
in a second direction crossing a first direction from the base body toward the first movable member, the third movable part being between the first movable part and the second movable part, in the second direction, the fourth movable part being between the first movable part and the third movable part, in the second direction, the fifth movable part being between the third movable part and the second movable part,
the first movable part being supported by the first support member, and the second movable part, the third movable part, the fourth movable part and the fifth movable part being separated from the base body,
a first width along a third direction of the first movable part being larger than a fourth width along the third direction of the fourth movable part and larger than a fifth width along the third direction of the fifth movable part, the third direction crossing a first plane including the first direction and the second direction, a third width of the third movable part being smaller than the fourth width and smaller than the fifth width, a third length along the second direction of the third movable part being shorter than a fourth length along the second direction of the fourth movable part and shorter than a fifth length along the second direction of the fifth movable part,
the second movable part including a first movable facing part facing the first conductive part in a second plane including the second direction and the third direction, the first movable facing part including a first movable protrusion portion protruding toward the first conductive part,
the first conductive part including a first conductive facing part facing the first movable facing part, the first conductive facing part including a first conductive protrusion portion protruding toward the first movable facing part, and
the first conductive protrusion portion overlapping the first movable protrusion portion in a first radiation direction passing through the third movable part and being along the second plane,
wherein
the first detection element further includes a second conductive part fixed to the base body,
the second movable part includes a second movable facing part facing the second conductive part in the second plane, and the second movable facing part includes a second movable protrusion portion protruding toward the second conductive part,
the second conductive part includes a second conductive facing part facing the second movable facing part, and the second conductive facing part includes a second conductive protrusion portion protruding toward the second movable facing part,
the second conductive protrusion portion overlaps the second movable protrusion portion in a second radiation direction passing through the third movable part and being along the second plane,
the first detection element further includes a third conductive part fixed to the base body,
the second movable part includes a third movable facing part facing the third conductive part in the second plane, and the third movable facing part includes a third movable protrusion portion protruding toward the third movable facing part,
the third conductive part includes a third conductive facing part facing the third movable facing part, and the third conductive facing part includes a third conductive protrusion portion protruding toward the third movable facing part,
the third conductive protrusion portion overlaps the third movable protrusion portion in a third radiation direction passing through the third moving part and being along the second plane, and
at least a portion of the second movable part is between the first conductive part and the third conductive part in an arc direction centered on the third movable part,
the first detection element further includes a fourth conductive part fixed to the base body,
the second movable part includes a fourth movable facing part facing the fourth conductive part in the second plane, and the fourth movable facing part includes a fourth movable protrusion portion protruding toward the fourth movable facing part,
the fourth conductive part includes a fourth conductive facing part facing the fourth movable facing part, and the fourth conductive facing part includes a fourth conductive protrusion portion protruding toward the fourth movable facing part,
the fourth conductive protrusion portion overlaps the fourth movable protrusion portion in a fourth radiation direction passing through the third moving part and being along the second plane, and
at least a portion of the second movable part is between the second conductive part and the fourth conductive part in the arc direction centered on the third movable part,
at least a portion of the third conductive part is between the first conductive part and the second conductive part,
at least a portion of the fourth conductive part is between the third conductive part and the second conductive part,
the third conductive part is electrically connected to the first conductive part, and
the fourth conductive part is electrically connected to the second conductive part.
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