CPC B41J 2/14129 (2013.01) [B41J 2/14032 (2013.01); B41J 2202/03 (2013.01)] | 17 Claims |
1. A liquid ejection head substrate comprising:
a flow passage forming member having an ejection orifice and a flow passage;
a heating resistance element for ejecting a liquid;
an insulating layer covering the heating resistance element;
a conductive protecting layer provided on or above the insulating layer and whose surface is exposed to the flow passage; and
an intermediate layer provided between the flow passage forming member and the conductive protecting layer, wherein
the intermediate layer contains a material represented by the following composition formula (I):
Siw1Ox1Cy1 (I)
in formula (I), 39≤w1≤62 at. %, 32≤x1≤55 at. %, 6≤y1≤29 at. %, and w1+x1+y1=100 at %.
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