CPC B32B 37/02 (2013.01) [B32B 7/022 (2019.01); B32B 7/06 (2013.01); B32B 9/045 (2013.01); B32B 27/281 (2013.01); B32B 38/10 (2013.01); B32B 2037/0092 (2013.01); B32B 2307/306 (2013.01); B32B 2307/51 (2013.01); B32B 2307/538 (2013.01); B32B 2307/748 (2013.01); B32B 2457/00 (2013.01)] | 4 Claims |
1. A first laminate of a first highly heat-resistant film and an inorganic substrate, wherein an adhesive is not substantially used and the first laminate has the following features (1) to (5):
(1) a tensile elasticity of the first highly heat-resistant film is 4 GPa or more;
(2) an adhesive strength between the first highly heat-resistant film and the inorganic substrate is 0.3 N/cm or less;
(3) a surface roughness Ra of a surface in contact with the inorganic substrate of the first highly heat-resistant film is 5 nm or less;
(4) a surface roughness Ra of a surface of the inorganic substrate after the first highly heat-resistant has been peeled off film from the first laminate is 3 nm or less; and
(5) a nitrogen element component ratio on a surface to be bonded to the first highly heat-resistant film of the inorganic substrate is 0.2 at % or more and 12 at % or less.
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