CPC H01L 28/55 (2013.01) [H01L 28/65 (2013.01); H01L 29/792 (2013.01)] | 20 Claims |
1. A capacitor comprising:
a first electrode;
a second electrode which is apart from the first electrode; and
a dielectric layer between the first electrode and the second electrode, the dielectric layer comprising
a base material including an oxide of a base metal, the base material having a dielectric constant of about 20 to about 70, and
co-dopants including a Group 3 element and a Group 5 element.
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