CPC H10N 30/06 (2023.02) [B81B 3/0021 (2013.01); B81C 1/00166 (2013.01); B81C 1/00349 (2013.01); H10N 30/87 (2023.02)] | 20 Claims |
1. A piezomicroelectromechanical system (piezoMEMS) device, comprising:
a first electrode layer arranged over a first piezoelectric layer;
a second piezoelectric layer arranged over the first electrode layer;
a second electrode layer arranged over the second piezoelectric layer;
a third piezoelectric layer arranged over the second electrode layer;
a first contact arranged over and extending through the second electrode layer and the second piezoelectric layer to contact the first electrode layer;
a dielectric liner layer arranged directly between the first contact and inner sidewalls of the second electrode layer and the second piezoelectric layer; and
a second contact arranged over and electrically coupled to the second electrode layer, wherein the second contact is electrically isolated from the first contact;
wherein a topmost surface of the dielectric liner layer is level with a top surface of the third piezoelectric layer, wherein the first contact comprises a horizontal extending portion overlying the dielectric liner layer and the third piezoelectric layer, and wherein the horizontal extending portion has a bottom surface facing and spaced from the topmost surface of the dielectric liner layer.
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