US 11,811,365 B2
Terahertz device and method for manufacturing terahertz device
Kazuisao Tsuruda, Kyoto (JP); and Hideaki Yanagida, Kyoto (JP)
Assigned to ROHM CO., LTD., Kyoto (JP)
Filed by ROHM CO., LTD., Kyoto (JP)
Filed on Jun. 3, 2022, as Appl. No. 17/832,209.
Application 17/832,209 is a continuation of application No. 17/296,192, granted, now 11,387,783, previously published as PCT/JP2019/046571, filed on Nov. 28, 2019.
Claims priority of application No. 2018-232463 (JP), filed on Dec. 12, 2018.
Prior Publication US 2022/0302878 A1, Sep. 22, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H03B 7/08 (2006.01); H01L 23/14 (2006.01); H01L 23/28 (2006.01); H01L 23/498 (2006.01); H01L 23/538 (2006.01); H01L 23/66 (2006.01); H01P 1/20 (2006.01); H01L 23/00 (2006.01); H01L 23/31 (2006.01); H01L 25/065 (2023.01); H01L 25/00 (2006.01)
CPC H03B 7/08 (2013.01) [H01L 23/14 (2013.01); H01L 23/28 (2013.01); H01L 23/3135 (2013.01); H01L 23/49811 (2013.01); H01L 23/49827 (2013.01); H01L 23/5389 (2013.01); H01L 23/66 (2013.01); H01L 24/16 (2013.01); H01L 24/81 (2013.01); H01L 24/97 (2013.01); H01L 25/0655 (2013.01); H01L 25/50 (2013.01); H01P 1/2005 (2013.01); H01L 2221/68345 (2013.01); H01L 2224/13111 (2013.01); H03B 2200/0084 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A terahertz device comprising:
a first resin layer having a first resin layer obverse face and a first resin layer reverse face that are spaced apart from each other in a first direction;
a first conductor having a first conductor obverse face and a first conductor reverse face, the first conductor extending within the first resin layer in the first direction;
a first wiring layer extending on the first resin layer obverse face and the first conductor obverse face;
a terahertz element having an element obverse face and an element reverse face;
a second resin layer having a second resin layer obverse face and a second resin layer reverse face that faces the first resin layer obverse face, the second resin layer covering at least the terahertz element; and
an external electrode electrically connected to first conductor reverse face,
wherein the terahertz element is electrically connected to the first wiring layer,
wherein the element reverse face is an active surface that emits or receives a terahertz wave, and
wherein a second conductor surrounds the terahertz element as viewed in the first direction.