US 11,811,337 B2
Nanofiber actuator and method for making the same
Guang Wang, Beijing (CN); He Ma, Beijing (CN); Xiang Jin, Beijing (CN); Hua Yuan, Beijing (CN); Yang Wei, Beijing (CN); Qun-Qing Li, Beijing (CN); Kai-Li Jiang, Beijing (CN); and Shou-Shan Fan, Beijing (CN)
Assigned to Tsinghua University, Beijing (CN); and HON HAI PRECISION INDUSTRY CO., LTD., New Taipei (TW)
Filed by Tsinghua University, Beijing (CN); and HON HAI PRECISION INDUSTRY CO., LTD., New Taipei (TW)
Filed on Aug. 18, 2020, as Appl. No. 16/996,686.
Claims priority of application No. 202010348545.7 (CN), filed on Apr. 28, 2020.
Prior Publication US 2021/0336564 A1, Oct. 28, 2021
Int. Cl. H02N 99/00 (2006.01); B82Y 30/00 (2011.01); C23C 16/56 (2006.01); C23C 16/455 (2006.01); C23C 16/40 (2006.01)
CPC H02N 99/00 (2013.01) [B82Y 30/00 (2013.01); C23C 16/403 (2013.01); C23C 16/45555 (2013.01); C23C 16/56 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A nanofiber actuator comprising:
a composite structure comprising a carbon nanotube wire and an aluminum oxide layer, wherein the aluminum oxide layer is coated on a surface of the carbon nanotube wire, and the aluminum oxide layer and the carbon nanotube wire are located coaxially with each other; and
a vanadium dioxide layer wrapping an entire surface of the composite structure, wherein the vanadium dioxide layer and the composite structure are located non-coaxially with each other.